000 00338nam a2200133Ia 4500
008 161018s9999 xx 000 0 und d
020 _a195681444
100 _aCampell,S.A.
_911407
245 _aThe Science And Engineering Of Microelectronic Fabrication.
250 _a2Ed
260 _bOxford
300 _a603p.
_bRs:360
490 _a3701
999 _c3701
_d3701