Chang Liu <br/><br/>
Foundation Of MEMS 

 - 2nd 
 - Chennai  Pearson Publication  2017 
 - 576p.  Rs:625 
 - 23064 .
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Foundations
<br/><br/><label>Dewey Class. No.: </label>621.3